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Title: Formation of continuous metallic film on quartz studied by noncontact resonant ultrasound spectroscopy

Dynamics of continuous film formation of metallic films on quartz substrates is studied using an electrodeless resonance method. Bare quartz is used as a substrate, and a metallic film is deposited on it. We use antenna transmission technique to measure the evolution of resonance frequencies and internal friction of the substrate during and after deposition, and the morphological transition between discontinuous islands and a continuous film is detected. By comparison with atomic force microscopy images, we confirm that the frequency drop and the internal-friction peak that appear during deposition indicate this transition. We also find that Pt film shows unexpected morphology change after deposition.
Authors:
; ; ;  [1]
  1. Osaka University, Graduate School of Engineering Science, Toyonaka, Osaka 560-8531 (Japan)
Publication Date:
OSTI Identifier:
22494802
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 118; Journal Issue: 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANTENNAS; ATOMIC FORCE MICROSCOPY; COMPARATIVE EVALUATIONS; DEPOSITION; INTERNAL FRICTION; METALS; MORPHOLOGY; QUARTZ; RESONANCE; SPECTROSCOPY; SUBSTRATES; THIN FILMS; ULTRASONIC WAVES