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Title: Effect of the out-of-plane stress on the properties of epitaxial SrTiO{sub 3} films with nano-pillar array on Si-substrate

A nonlinear thermodynamic formalism has been proposed to calculate the physical properties of the epitaxial SrTiO{sub 3} films containing vertical nano-pillar array on Si-substrate. The out-of-plane stress induced by the mismatch between film and nano-pillars provides an effective way to tune the physical properties of ferroelectric SrTiO{sub 3} films. Tensile out-of-plane stress raises the phase transition temperature and increases the out-of-plane polarization, but decreases the out-of-plane dielectric constant below Curie temperature, pyroelectric coefficient, and piezoelectric coefficient. These results showed that by properly controlling the out-of-plane stress, the out-of-plane stress induced paraelectric-ferroelectric phase transformation will appear near room temperature. Excellent dielectric, pyroelectric, piezoelectric properties of these SrTiO{sub 3} films similar to PZT and other lead-based ferroelectrics can be expected.
Authors:
 [1] ;  [2] ;  [1] ;  [3] ;  [4]
  1. Jiangsu Provincial Engineering Laboratory for RF Integration and Micropackaging and College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023 (China)
  2. (China)
  3. Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093 (China)
  4. School of Automation, Nanjing University of Posts and Telecommunications, Nanjing 210023 (China)
Publication Date:
OSTI Identifier:
22494762
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 118; Journal Issue: 7; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CURIE POINT; EPITAXY; FERROELECTRIC MATERIALS; LEAD; NONLINEAR PROBLEMS; PERMITTIVITY; PHASE TRANSFORMATIONS; PIEZOELECTRICITY; POLARIZATION; PZT; SILICON; STRESSES; STRONTIUM TITANATES; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THERMODYNAMIC MODEL; THIN FILMS