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Title: Development of scanning electron and x-ray microscope

We have developed a new type of microscope possessing a unique feature of observing both scanning electron and X-ray images under one unit. Unlike former X-ray microscopes using SEM [1, 2], this scanning electron and X-ray (SELX) microscope has a sample in vacuum, thus it enables one to observe a surface structure of a sample by SEM mode, to search the region of interest, and to observe an X-ray image which transmits the region. For the X-ray observation, we have been focusing on the soft X-ray region from 280 eV to 3 keV to observe some bio samples and soft materials. The resolutions of SEM and X-ray modes are 50 nm and 100 nm, respectively, at the electron energy of 7 keV.
Authors:
; ;  [1]
  1. Hamamatsu Photonics K.K., 314-5, Shimokanzo, Iwata City, Shizuoka-Pref. (Japan)
Publication Date:
OSTI Identifier:
22494400
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1696; Journal Issue: 1; Conference: XRM 2014: 12. international conference on X-ray microscopy, Melbourne (Australia), 26-31 Oct 2014; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELECTRON SCANNING; ELECTRONS; EV RANGE 100-1000; FOCUSING; IMAGES; KEV RANGE 01-10; MICROSCOPES; RESOLUTION; SCANNING ELECTRON MICROSCOPY; SOFT X RADIATION; SURFACES