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Title: Compact scanning transmission x-ray microscope at the photon factory

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.4937514· OSTI ID:22494388
; ;  [1];  [2];  [2]
  1. High Energy Accelerator Research Organization (KEK), 1-1 Oho, Tsukuba 305-0801 (Japan)
  2. Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima 739-8526 (Japan)

We report the design and performance of a compact scanning transmission X-ray microscope developed at the Photon Factory. Piezo-driven linear stages are used as coarse stages of the microscope to realize excellent compactness, mobility, and vibrational and thermal stability. An X-ray beam with an intensity of ∼10{sup 7} photons/s was focused to a diameter of ∼40 nm at the sample. At the soft X-ray undulator beamline used with the microscope, a wide range of photon energies (250–1600 eV) is available. The microscope has been used to research energy materials and in environmental sciences.

OSTI ID:
22494388
Journal Information:
AIP Conference Proceedings, Vol. 1696, Issue 1; Conference: XRM 2014: 12. international conference on X-ray microscopy, Melbourne (Australia), 26-31 Oct 2014; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English