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Title: Upgrading multilayer zone plate technology for hard x-ray focusing

Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi{sub 2} and Si layers alternately deposited on a glass fiber by magnetron sputtering so that all zone boundaries satisfy the Fresnel zone configuration. The focused beam was evaluated using knife-edge scanning in which the measured intensity distribution is identical to the line spread function (LSF) in the focal plane. The focused beamsize of about 30 nm was estimated by oscillation peaks observed in the measured LSF according to Rayleigh’s criterion.
Authors:
;  [1] ;  [2] ; ; ; ;  [1] ;  [1] ;  [3] ; ;  [4] ;  [4] ;  [2]
  1. Graduate School of Material Science, University of Hyogo, Kamigori, Hyogo 678-1297 (Japan)
  2. (Japan)
  3. (JASRI/SPring-8) (Japan)
  4. NTT Advanced Technology Corporation (Japan)
Publication Date:
OSTI Identifier:
22494387
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1696; Journal Issue: 1; Conference: XRM 2014: 12. international conference on X-ray microscopy, Melbourne (Australia), 26-31 Oct 2014; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; BEAMS; DEPOSITS; DISTRIBUTION; FIBERGLASS; FOCUSING; FRESNEL COEFFICIENT; HARD X RADIATION; KEV RANGE 10-100; LAYERS; MAGNETRONS; MOLYBDENUM SILICIDES; OSCILLATIONS; PEAKS; PLATES; RAYLEIGH NUMBER; SPRING-8 STORAGE RING; SPUTTERING; SYNCHROTRONS