Upgrading multilayer zone plate technology for hard x-ray focusing

Journal Article · Thu Jan 28 00:00:00 EST 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4937511· OSTI ID:22494387

Hirotomo, Toshiki; Konishi, Shigeki ^[1]; Takano, Hidekazu; Sumida, Kazuhiro; Tsusaka, Yoshiyuki; Kagoshima, Yasushi ^[1]; Koyama, Takahisa ^[1]; Ichimaru, Satoshi; Ohchi, Tadayuki ^[2]; Takenaka, Hisataka ^[2]

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1. Graduate School of Material Science, University of Hyogo, Kamigori, Hyogo 678-1297 (Japan)
2. NTT Advanced Technology Corporation (Japan)

Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi{sub 2} and Si layers alternately deposited on a glass fiber by magnetron sputtering so that all zone boundaries satisfy the Fresnel zone configuration. The focused beam was evaluated using knife-edge scanning in which the measured intensity distribution is identical to the line spread function (LSF) in the focal plane. The focused beamsize of about 30 nm was estimated by oscillation peaks observed in the measured LSF according to Rayleigh’s criterion.

• OSTI ID: 22494387
• Journal Information: AIP Conference Proceedings, Vol. 1696, Issue 1; Conference: XRM 2014: 12. international conference on X-ray microscopy, Melbourne (Australia), 26-31 Oct 2014; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BEAMS
DEPOSITS
DISTRIBUTION
FIBERGLASS
FOCUSING
FRESNEL COEFFICIENT
HARD X RADIATION
KEV RANGE 10-100
LAYERS
MAGNETRONS
MOLYBDENUM SILICIDES
OSCILLATIONS
PEAKS
PLATES
RAYLEIGH NUMBER
SPRING-8 STORAGE RING
SPUTTERING
SYNCHROTRONS