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Title: Growing LaAlO{sub 3}/SrTiO{sub 3} interfaces by sputter deposition

Sputter deposition of oxide materials in a high-pressure oxygen atmosphere is a well-known technique to produce thin films of perovskite oxides in particular. Also interfaces can be fabricated, which we demonstrated recently by growing LaAlO{sub 3} on SrTiO{sub 3} substrates and showing that the interface showed the same high degree of epitaxy and atomic order as is made by pulsed laser deposition. However, the high pressure sputtering of oxides is not trivial and number of parameters are needed to be optimized for epitaxial growth. Here we elaborate on the earlier work to show that only a relatively small parameter window exists with respect to oxygen pressure, growth temperature, radiofrequency power supply and target to substrate distance. In particular the sensitivity to oxygen pressure makes it more difficult to vary the oxygen stoichiometry at the interface, yielding it insulating rather than conducting.
Authors:
 [1] ; ; ;  [2] ;  [3] ; ;  [4]
  1. Kamerlingh Onnes Laboratorium, Leiden University (Netherlands)
  2. National Center for High Resolution Microscopy, Kavli Institute for Nanoscience, Delft Technical University, Lorentzweg 1, 2628 CJ Delft (Netherlands)
  3. Faculty of Science and Technology and MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede (Netherlands)
  4. Huygens - Kamerlingh Onnes Laboratorium, Leiden University (Netherlands)
Publication Date:
OSTI Identifier:
22493916
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Advances; Journal Volume: 5; Journal Issue: 6; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINATES; CRYSTAL GROWTH; ENERGY BEAM DEPOSITION; EPITAXY; INTERFACES; LANTHANUM COMPOUNDS; LASER RADIATION; OXYGEN; PEROVSKITE; PULSED IRRADIATION; RADIOWAVE RADIATION; SPUTTERING; STOICHIOMETRY; STRONTIUM TITANATES; SUBSTRATES; THIN FILMS