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Title: Relatively high plasma density in low pressure inductive discharges

Electron energy probability functions (EEPFs) were measured in a low pressure argon inductive discharge. As radio frequency (RF) power increases, discharge mode is changed from E-mode (capacitively coupled) to H-mode (inductively coupled) and the EEPFs evolve from a bi-Maxwellian distribution to a Maxwellian distribution. It is found that the plasma densities at low RF powers (<30 W) are much higher than the density predicted from the slope of the densities at high powers. Because high portion of high energy electrons of the bi-Maxwellian distribution lowers the collisional energy loss and low electron temperature of low energy electrons reduces particle loss rate at low powers. Therefore, the energy loss of plasma decreases and electron densities become higher at low powers.
Authors:
; ;  [1]
  1. Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22493788
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 9; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; BOLTZMANN STATISTICS; ELECTRON DENSITY; ELECTRON TEMPERATURE; ENERGY LOSSES; H-MODE PLASMA CONFINEMENT; PARTICLE LOSSES; PLASMA DENSITY; PRESSURE RANGE KILO PA; PROBABILITY DENSITY FUNCTIONS; RADIOWAVE RADIATION