Epitaxial growth of three dimensionally structured III-V photonic crystal via hydride vapor phase epitaxy

Journal Article · Mon Dec 14 00:00:00 EST 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4937273· OSTI ID:22493026

Zheng, Qiye; Kim, Honggyu; Zhang, Runyu; Zuo, Jianmin; Sardela, Mauro ^[1]; Balaji, Manavaimaran; Lourdudoss, Sebastian; Sun, Yan-Ting ^[2]

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1. Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
2. Laboratory of Semiconductor Materials, Department of Materials and Nano Physics, Royal Institute of Technology (KTH), Electrum 229, 164 40 Kista (Sweden)

Three-dimensional (3D) photonic crystals are one class of materials where epitaxy, and the resultant attractive electronic properties, would enable new functionalities for optoelectronic devices. Here we utilize self-assembled colloidal templates to fabricate epitaxially grown single crystal 3D mesostructured Ga{sub x}In{sub 1−x}P (GaInP) semiconductor photonic crystals using hydride vapor phase epitaxy (HVPE). The epitaxial relationship between the 3D GaInP and the substrate is preserved during the growth through the complex geometry of the template as confirmed by X-ray diffraction (XRD) and high resolution transmission electron microscopy. XRD reciprocal space mapping of the 3D epitaxial layer further demonstrates the film to be nearly fully relaxed with a negligible strain gradient. Fourier transform infrared spectroscopy reflection measurement indicates the optical properties of the photonic crystal which agree with finite difference time domain simulations. This work extends the scope of the very few known methods for the fabrication of epitaxial III-V 3D mesostructured materials to the well-developed HVPE technique.

• OSTI ID: 22493026
• Journal Information: Journal of Applied Physics, Vol. 118, Issue 22; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
FINITE DIFFERENCE METHOD
FOURIER TRANSFORM SPECTROMETERS
HYDRIDES
MONOCRYSTALS
OPTICAL PROPERTIES
OPTOELECTRONIC DEVICES
REFLECTION
SEMICONDUCTOR MATERIALS
THIN FILMS
THREE-DIMENSIONAL LATTICES
TRANSMISSION ELECTRON MICROSCOPY
VAPOR PHASE EPITAXY
X-RAY DIFFRACTION