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Title: Emissivity of freestanding membranes with thin metal coatings

Freestanding silicon nitride membranes with thicknesses down to a few tens of nanometers find use as TEM windows or soft X-ray spectral purity filters. As the thickness of a membrane decreases, emissivity vanishes, which limits radiative heat emission and resistance to heat loads. We show that thin metal layers with thicknesses in the order of 1 nm enhance the emissivity of thin membranes by two to three orders of magnitude close to the theoretical limit of 0.5. This considerably increases thermal load capacity of membranes in vacuum environments. Our experimental results are in line with classical theory in which we adapt thickness dependent scattering terms in the Drude and Lorentz oscillators.
Authors:
; ; ; ; ;  [1] ; ; ;  [2]
  1. ASML Netherlands B.V., De Run 6501, 5504 DR Veldhoven (Netherlands)
  2. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede (Netherlands)
Publication Date:
OSTI Identifier:
22492993
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 118; Journal Issue: 21; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COATINGS; EMISSIVITY; HEATING LOAD; MEMBRANES; METALS; OSCILLATORS; SCATTERING; SILICON NITRIDES; SOFT X RADIATION; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY