The effect of ultraviolet irradiation on the ultra-thin HfO{sub 2} based CO gas sensor
- Department of Physics, Gazi University, 06500 Ankara (Turkey)
- Department of Physics, Hitit University, 19030 Çorum (Turkey)
In this work, an effort has been made to fabricate ultrathin HfO{sub 2}/Al{sub 2}O{sub 3} sample by atomic layer deposition method for the fast detection of CO gas at room temperature. The effect of the operating temperature and the UV light on the gas sensing characteristics has been studied. We investigated the optimum operating temperature for the sample by sensing 25 ppm CO and CO{sub 2} gases from room temperature to 150 °C for 10 °C steps. The maximum response was obtained at 150 °C for both gases in the measurement temperature range. Also, the photoresponse measurements clearly show the effect of UV light on the sample. At room temperature, sensor showed superior response (14%) for 5 ppm CO gas. The response time of sensor is 6 s to 5 ppm CO gas concentration. The ultrathin HfO{sub 2} based sample shows acceptable gas sensitivity for 5 ppm CO gas at room temperature under UV light irradiation.
- OSTI ID:
- 22492891
- Journal Information:
- Journal of Applied Physics, Vol. 118, Issue 17; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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