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Title: Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H{sub 2} and H{sub 2}-N{sub 2} plasmas

Graphene is the first engineering electronic material, which is purely two-dimensional: it consists of two exposed sp{sup 2}-hybridized carbon surfaces and has no bulk. Therefore, surface effects such as contamination by adsorbed polymer residues have a critical influence on its electrical properties and can drastically hamper its widespread use in devices fabrication. These contaminants, originating from mandatory technological processes of graphene synthesis and transfer, also impact fundamental studies of the electronic and structural properties at the atomic scale. Therefore, graphene-based technology and research requires “soft” and selective surface cleaning techniques dedicated to limit or to suppress this surface contamination. Here, we show that a high-density H{sub 2} and H{sub 2}-N{sub 2} plasmas can be used to selectively remove polymeric residues from monolayer graphene without any damage on the graphene surface. The efficiency of this dry-cleaning process is evidenced unambiguously by a set of spectroscopic and microscopic methods, providing unprecedented insights on the cleaning mechanisms and highlighting the role of specific poly-methyl-methacrylate residues at the graphene interface. The plasma is shown to perform much better cleaning than solvents and has the advantage to be an industrially mature technology adapted to large area substrates. The process is transferable to other kinds ofmore » two-dimensional material and heterostructures.« less
Authors:
; ;  [1] ; ;  [2] ;  [3] ; ;  [4]
  1. Laboratoire des Technologies de la Microélectronique, CNRS-UJF, 17 rue des Martyrs, 38054 Grenoble (France)
  2. CEA, LETI, MINATEC, 17 rue des Martyrs, 38054 Grenoble (France)
  3. CEA, INAC/SP2M/LEMMA, 17 rue des Martyrs, 38054 Grenoble (France)
  4. Institut Néel, CNRS-UJF-INP, BP 166, 38042 Grenoble Cedex 9 (France)
Publication Date:
OSTI Identifier:
22492712
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 118; Journal Issue: 12; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DENSITY; ELECTRICAL PROPERTIES; FABRICATION; GRAPHENE; HYDROGEN; INTERFACES; METHACRYLIC ACID ESTERS; PLASMA; POLYMERS; RESIDUES; SOLVENTS; SUBSTRATES; SURFACE CLEANING; SURFACE CONTAMINATION; SURFACES; SYNTHESIS; TWO-DIMENSIONAL CALCULATIONS; TWO-DIMENSIONAL SYSTEMS