skip to main content

SciTech ConnectSciTech Connect

Title: Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond

Near-surface nitrogen-vacancy (NV) centers in diamond have been successfully employed as atomic-sized magnetic field sensors for external spins over the last years. A key challenge is still to develop a method to bring NV centers at nanometer proximity to the diamond surface while preserving their optical and spin properties. To that aim we present a method of controlled diamond etching with nanometric precision using an oxygen inductively coupled plasma process. Importantly, no traces of plasma-induced damages to the etched surface could be detected by X-ray photoelectron spectroscopy and confocal photoluminescence microscopy techniques. In addition, by profiling the depth of NV centers created by 5.0 keV of nitrogen implantation energy, no plasma-induced quenching in their fluorescence could be observed. Moreover, the developed etching process allowed even the channeling tail in their depth distribution to be resolved. Furthermore, treating a {sup 12}C isotopically purified diamond revealed a threefold increase in T{sub 2} times for NV centers with <4 nm of depth (measured by nuclear magnetic resonance signal from protons at the diamond surface) in comparison to the initial oxygen-terminated surface.
Authors:
; ; ;  [1] ;  [2] ; ;  [3] ;  [1] ;  [4]
  1. 3. Institute of Physics, Research Center SCoPE and IQST, University of Stuttgart, 70569 Stuttgart (Germany)
  2. Max Planck Institute for Solid State Research, 70569 Stuttgart (Germany)
  3. Element Six Innovation, Harwell Oxford, Didcot, Oxfordshire OX11 0QR (United Kingdom)
  4. (Germany)
Publication Date:
OSTI Identifier:
22492701
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 7; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CARBON 12; CHANNELING; COMPARATIVE EVALUATIONS; DIAMONDS; ETCHING; FLUORESCENCE; KEV RANGE 01-10; MAGNETIC FIELDS; MICROSCOPY; NANOSTRUCTURES; NITROGEN; NUCLEAR MAGNETIC RESONANCE; OXYGEN; PHOTOLUMINESCENCE; PROTONS; QUENCHING; SENSORS; SPATIAL DISTRIBUTION; VACANCIES; X-RAY PHOTOELECTRON SPECTROSCOPY