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Title: Pulsed laser deposition of niobium nitride thin films

Niobium nitride (NbN{sub x}) films were grown on Nb and Si(100) substrates using pulsed laser deposition. NbN{sub x} films were deposited on Nb substrates using PLD with a Q-switched Nd:YAG laser (λ = 1064 nm, ∼40 ns pulse width, and 10 Hz repetition rate) at different laser fluences, nitrogen background pressures and deposition substrate temperatures. When all the fabrication parameters are fixed, except for the laser fluence, the surface roughness, nitrogen content, and grain size increase with increasing laser fluence. Increasing nitrogen background pressure leads to a change in the phase structure of the NbN{sub x} films from mixed β-Nb{sub 2}N and cubic δ-NbN phases to single hexagonal β-Nb{sub 2}N. The substrate temperature affects the preferred orientation of the crystal structure. The structural and electronic, properties of NbN{sub x} deposited on Si(100) were also investigated. The NbN{sub x} films exhibited a cubic δ-NbN with a strong (111) orientation. A correlation between surface morphology, electronic, and superconducting properties was found. The observations establish guidelines for adjusting the deposition parameters to achieve the desired NbN{sub x} film morphology and phase.
Authors:
;  [1] ;  [2] ;  [3] ;  [4] ;  [5]
  1. Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, VA 23529 (United States)
  2. (United States)
  3. (Egypt)
  4. Department of Physics, University of Cukurova, 01330 Adana (Turkey)
  5. Thomas Jefferson National Accelerator Facility, Newport News, Virginia 23606 (United States)
Publication Date:
OSTI Identifier:
22492684
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1687; Journal Issue: 1; Conference: Ingot niobium summary workshop, Newport News, VA (United States), 4 Dec 2015; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYSTAL STRUCTURE; DEPOSITS; ENERGY BEAM DEPOSITION; GRAIN ORIENTATION; GRAIN SIZE; LASER RADIATION; MORPHOLOGY; NEODYMIUM LASERS; NIOBIUM NITRIDES; NIOBIUM-BETA; NITROGEN; PULSED IRRADIATION; ROUGHNESS; SILICON; SUBSTRATES; SUPERCONDUCTIVITY; SURFACES; THIN FILMS