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Title: Theoretical analysis of surface acoustic wave propagating properties of Y-cut nano lithium niobate film on silicon dioxide

The surface acoustic wave (SAW) propagating characteristics of Y-cut nano LiNbO{sub 3} (LN) film on SiO{sub 2}/LN substrate have been theoretically calculated. The simulated results showed a shear horizontal (SH) SAW with enhanced electromechanical coupling factor K{sup 2} owing to a dimensional effect of the nanoscale LN film. However, a Rayleigh SAW and two other resonances related to thickness vibrations caused spurious responses for wideband SAW devices. These spurious waves could be fully suppressed by properly controlling structural parameters including the electrode layer height, thickness, and the Euler angle (θ) of the LN thin film. Finally, a pure SH SAW was obtained with a wide θ range, from 0° to 5° and 165° to 180°. The largest K{sup 2} achieved for the pure SH SAW was about 35.1%. The calculated results demonstrate the promising application of nano LN film to the realization of ultra-wideband SAW devices.
Authors:
; ; ; ; ; ;  [1]
  1. Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240 (China)
Publication Date:
OSTI Identifier:
22492328
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Advances; Journal Volume: 5; Journal Issue: 8; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; COUPLING; ELECTRODES; LAYERS; LITHIUM COMPOUNDS; NANOSTRUCTURES; NIOBATES; RESONANCE; SHEAR; SILICON OXIDES; SOUND WAVES; SUBSTRATES; SURFACES; THIN FILMS