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Title: Simultaneous fabrication of nanogap electrodes using field-emission-induced electromigration

We present a simple technique for simultaneous control of the electrical properties of multiple Ni nanogaps. This technique is based on electromigration induced by a field emission current and is called “activation.” Simultaneous tuning of the tunnel resistance of multiple nanogaps was achieved by passing a Fowler–Nordheim (F-N) field emission current through an initial group of three Ni nanogaps connected in series. The Ni nanogaps, which had asymmetrical shapes with initial gap separations in the 80–110-nm range, were fabricated by electron-beam lithography and a lift-off process. By performing the activation procedure, the current–voltage properties of the series-connected nanogaps were varied simultaneously from “insulating” to “metallic” via “tunneling” properties by increasing the preset current of the activation procedure. We can also simultaneously control the tunnel resistances of the series-connected nanogaps, which range from a resistance of the order of 100 TΩ–100 kΩ, by increasing the preset current from 1 nA to 30 μA. This tendency is quite similar to that of individually activated nanogaps, and the tunnel resistance values of the simultaneously activated nanogaps were almost the same at each preset current. These results clearly imply that the electrical properties of the series-connected nanogaps can be controlled simultaneously via the activation procedure.
Authors:
; ; ;  [1]
  1. Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588 (Japan)
Publication Date:
OSTI Identifier:
22490755
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 118; Journal Issue: 1; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CONTROL; CURRENTS; ELECTRIC POTENTIAL; ELECTRICAL PROPERTIES; ELECTRODES; ELECTRON BEAMS; ELECTROPHORESIS; FABRICATION; FIELD EMISSION; TUNING; TUNNEL EFFECT