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Title: Deposition of high permeability FeCoN films on mica substrates

In this study, sheet mica was explored as an alternative substrate for thin film deposition due to its unique layered structure and atomically flat surface. Static magnetic properties and microwave permeability of sputtered FeCoN films on mica with and without SiO{sub 2} under-layer were examined. In-plane isotropy and a large coercivity of 70 Oe were observed for the film directly deposited on mica substrate. With the insertion of 40 nm SiO{sub 2} under-layer between the film and mica substrate, well-defined in-plane anisotropy is formed due to the significant reduce in film residual stress, associated with a 3 Oe coercive force along easy axis. As a result, excellent microwave properties have been achieved and are comparable with the same film on Si substrate. Moreover, the permeability spectra are surprisingly stable from room temperature up to 390 K. Mica is proved as a promising substrate for magnetic films with high microwave performance, which is a great advantage for practical applications. Furthermore, our results provide an effective way to reduce the residual stress in sputtered films.
Authors:
; ; ; ;  [1] ; ;  [2]
  1. Temasek Laboratories, National University of Singapore, 5A Engineering Drive 1, Singapore 117411 (Singapore)
  2. Department of Materials Science and Engineering, National University of Singapore, Singapore 119260 (Singapore)
Publication Date:
OSTI Identifier:
22490753
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 118; Journal Issue: 1; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANISOTROPY; COERCIVE FORCE; DEPOSITION; ISOTROPY; LAYERS; MAGNETIC PROPERTIES; MICA; MICROWAVE RADIATION; PERMEABILITY; RESIDUAL STRESSES; SILICON OXIDES; SPUTTERING; SUBSTRATES; SURFACES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS