Structural and optical properties of oxygen irradiated Zn{sub 1-x}Mg{sub x}O (x = 0, 0.2) thin films

Journal Article · Wed Jun 24 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4918141· OSTI ID:22490548

Kumar, Parmod; Malik, Hitendra K. ^[1]

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1. Department of Physics, Indian Institute of Technology Delhi, New Delhi – 110 016 (India)

In the present study we report the effect of oxygen ion beam irradiation on the structural and optical properties of pure and 20% Mg doped ZnO thin films. These films were grown on Si substrate using RF sputtering technique. X-ray diffraction study confirms the formation of hexagonal wurtzite phase and the lattice parameter is found to reduce by Mg incorporation which further decreases after irradiation. The optical properties of the thin films using UV-Vis spectroscopy technique indicate an increment in the optical band gap with Mg incorporation as well as after irradiation.

• OSTI ID: 22490548
• Journal Information: AIP Conference Proceedings, Vol. 1665, Issue 1; Conference: 59. DAE solid state physics symposium 2014, Tamilnadu (India), 16-20 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION SPECTROSCOPY
DOPED MATERIALS
ENERGY GAP
HEXAGONAL LATTICES
IRRADIATION
LATTICE PARAMETERS
MAGNESIUM
OPTICAL PROPERTIES
OXYGEN
OXYGEN IONS
SILICON
SPUTTERING
SUBSTRATES
THIN FILMS
X-RAY DIFFRACTION
ZINC OXIDES