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Title: WO{sub 3} thin film based multiple sensor array for electronic nose application

Multiple sensor array comprising 16 x 2 sensing elements were realized using RF sputtered WO{sub 3} thin films. The sensor films were modified with a thin layer of sensitizers namely Au, Ni, Cu, Al, Pd, Ti, Pt. The resulting sensor array were tested for their response towards different gases namely H{sub 2}S, NH{sub 3}, NO and C{sub 2}H{sub 5}OH. The sensor response values measured from the response curves indicates that the sensor array generates a unique signature pattern (bar chart) for the gases. The sensor response values can be used to get both qualitative and quantitative information about the gas.
Authors:
; ; ; ; ; ;  [1] ;  [1] ;  [2]
  1. Thin Film Devices Section, Technical Physics Division, Bhabha Atomic Research Centre, Mumbai–400085 (India)
  2. (India)
Publication Date:
OSTI Identifier:
22490414
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1665; Journal Issue: 1; Conference: 59. DAE solid state physics symposium 2014, Tamilnadu (India), 16-20 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; AMMONIA; COPPER; GASES; GOLD; HYDROGEN SULFIDES; NICKEL; NITRIC OXIDE; NOSE; PALLADIUM; PLATINUM; SENSITIZERS; SENSORS; SPUTTERING; THIN FILMS; TITANIUM; TUNGSTEN OXIDES