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Title: Large area fabrication of plasmonic nanoparticle grating structure by conventional scanning electron microscope

Plasmonic nanoparticle grating (PNG) structure of different periods has been fabricated by electron beam lithography using silver halide based transmission electron microscope film as a substrate. Conventional scanning electron microscope is used as a fabrication tool for electron beam lithography. Optical microscope and energy dispersive spectroscopy (EDS) have been used for its morphological and elemental characterization. Optical characterization is performed by UV-Vis absorption spectroscopic technique.
Authors:
; ; ;  [1] ;  [2]
  1. Indus Synchrotron Utilization Division, Raja Ramanna Centre for Advance Technology, Indore-452013 (India)
  2. Mechanical & Optical Support Section, Raja Ramanna Centre for Advance Technology, Indore 452013 (India)
Publication Date:
OSTI Identifier:
22490247
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1665; Journal Issue: 1; Conference: 59. DAE solid state physics symposium 2014, Tamilnadu (India), 16-20 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABSORPTION; ABSORPTION SPECTROSCOPY; ELECTRON BEAMS; FABRICATION; FILMS; PLASMONS; SCANNING ELECTRON MICROSCOPY; SILVER HALIDES; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTRA; VISIBLE SPECTRA; X-RAY SPECTROSCOPY