Confocal Raman studies in determining crystalline nature of PECVD grown Si nanowires

Journal Article · Wed Jun 24 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4917659· OSTI ID:22490228

Ahmed, Nafis; Bhargav, P. Balaji; Ramasamy, P. ^[1]; Sivadasan, A. K.; Tyagi, A. K.; Amirthapandian, S.; Panigrahi, B. K. ^[2]; Bhattacharya, S. ^[1]

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1. SSN Research Centre, Kalavakkam-603110, Tamilnadu (India)
2. Materials Physics Division, Indira Gandhi Centre for Atomic Research, Kalpakkam-603102 (India)

Silicon nanowires of diameter ∼200 nm and length of 2-4 µm are grown in the plasma enhanced chemical vapour deposition technique using nanoclustered Au catalyst assisted vapour-liquid-solid process. The crystallinity in the as-grown and annealed samples is studied using confocal Raman spectroscopic studies. Amorphous phase is formed in the as-grown samples. Structural studies using high resolution transmission electron microscopy confirm the polycrystalline nature in the annealed sample.

• OSTI ID: 22490228
• Journal Information: AIP Conference Proceedings, Vol. 1665, Issue 1; Conference: 59. DAE solid state physics symposium 2014, Tamilnadu (India), 16-20 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
ANNEALING
CATALYSTS
CHEMICAL VAPOR DEPOSITION
CRYSTAL GROWTH
GOLD
LIQUIDS
NANOWIRES
PLASMA
POLYCRYSTALS
RAMAN SPECTROSCOPY
RESOLUTION
SILICON
SOLIDS
TRANSMISSION ELECTRON MICROSCOPY
VAPORS