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Title: Characterization of a radio frequency hollow electrode discharge at low gas pressures

A radio frequency (RF) hollow discharge configuration is presented, which makes use of a combination of RF plasma generation and the hollow cathode effect. The system was especially designed for the treatment of nanoparticles, plasma polymerization, and nanocomposite fabrication. The process gas streams through the plasma in the inner of the cylindrical electrode system. In the here presented measurements, pure argon and argon with oxygen admixtures are exemplarily used. The discharge is characterized by probe measurements in the effluent, electrical measurements of the discharge parameters, and visual observations of the plasma glow. It is found that the RF fluctuations of the plasma potential are weak. The plasma potential resembles the one of a DC hollow cathode discharge, the RF hollow electrode acts as a cathode due to the self-bias, and a high voltage sheath forms in its inner cylinder.
Authors:
; ; ;  [1] ; ;  [2]
  1. Institute for Materials Science – Multicomponent Materials, University of Kiel, 24143 Kiel (Germany)
  2. Institute of Experimental and Applied Physics, University of Kiel, 24098 Kiel (Germany)
Publication Date:
OSTI Identifier:
22490098
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; CYLINDERS; CYLINDRICAL CONFIGURATION; GLOW DISCHARGES; HOLLOW CATHODES; NANOCOMPOSITES; NANOPARTICLES; OXYGEN; PLASMA; PLASMA POTENTIAL; POLYMERIZATION; RADIOWAVE RADIATION