Characterization of a radio frequency hollow electrode discharge at low gas pressures
- Institute for Materials Science – Multicomponent Materials, University of Kiel, 24143 Kiel (Germany)
- Institute of Experimental and Applied Physics, University of Kiel, 24098 Kiel (Germany)
A radio frequency (RF) hollow discharge configuration is presented, which makes use of a combination of RF plasma generation and the hollow cathode effect. The system was especially designed for the treatment of nanoparticles, plasma polymerization, and nanocomposite fabrication. The process gas streams through the plasma in the inner of the cylindrical electrode system. In the here presented measurements, pure argon and argon with oxygen admixtures are exemplarily used. The discharge is characterized by probe measurements in the effluent, electrical measurements of the discharge parameters, and visual observations of the plasma glow. It is found that the RF fluctuations of the plasma potential are weak. The plasma potential resembles the one of a DC hollow cathode discharge, the RF hollow electrode acts as a cathode due to the self-bias, and a high voltage sheath forms in its inner cylinder.
- OSTI ID:
- 22490098
- Journal Information:
- Physics of Plasmas, Vol. 22, Issue 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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