Comparison of line x-ray emission from solid and porous nano-layer coated targets irradiated by double laser pulses
- Faculty of Science, Lahijan Branch, Islamic Azad University, Lahijan (Iran, Islamic Republic of)
- Department of Physics, Iran University of Science and Technology, Narmak, Tehran (Iran, Islamic Republic of)
Enhancement of line x-ray emission from both solid and porous iron targets induced by irradiation of single and double laser pulses is studied numerically. The line emission from laser produced plasma is calculated within the extreme ultra-violet lithography wavelength range of 13.5–13.7 nm. The effects of pre-pulse intensity and delay time between two pulses (pre-pulse and main pulse) are examined. The results show that using double pulses irradiation in the conditions of porous target can reduce the x-ray enhancement. According to the results, the use of both pre-pulse and porous target leads to efficient absorption of the laser energy. Calculations also show that such enhanced laser absorption can ionize atoms of the target material to very high degrees of ionization, leading to decrease of the density of appropriate ions that are responsible for line emission in the selected wavelength region. By increasing the target porosity, x-ray yield was more reduced.
- OSTI ID:
- 22489874
- Journal Information:
- Physics of Plasmas, Vol. 22, Issue 11; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
Similar Records
[Utilizing the ultraintense JanUSP laser at LLNL]. 99-ERD-049 Final LDRD Report
Characterization of out-of-band radiation and plasma parameters in laser-produced Sn plasmas for extreme ultraviolet lithography light sources