skip to main content

Title: Atomic layer deposition of alternative glass microchannel plates

The technique of atomic layer deposition (ALD) has enabled the development of alternative glass microchannel plates (MCPs) with independently tunable resistive and emissive layers, resulting in excellent thickness uniformity across the large area (20 × 20 cm), high aspect ratio (60:1 L/d) glass substrates. Furthermore, the use of ALD to deposit functional layers allows the optimal substrate material to be selected, such as borosilicate glass, which has many benefits compared to the lead-oxide glass used in conventional MCPs, including increased stability and lifetime, low background noise, mechanical robustness, and larger area (at present up to 400 cm{sup 2}). Resistively stable, high gain MCPs are demonstrated due to the deposition of uniform ALD resistive and emissive layers on alternative glass microcapillary substrates. The MCP performance characteristics reported include increased stability and lifetime, low background noise (0.04 events cm{sup −2} s{sup −1}), and low gain variation (±5%)
Authors:
; ; ; ; ; ; ; ; ;  [1] ; ;  [2] ; ;  [3]
  1. Incom, Inc., 294 Southbridge Road, Charlton, Massachusetts 01507 (United States)
  2. Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439 (United States)
  3. Space Sciences Laboratory, University of California, 7 Gauss Way, Berkeley, California 94720 (United States)
Publication Date:
OSTI Identifier:
22489761
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 34; Journal Issue: 1; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ASPECT RATIO; BACKGROUND NOISE; BOROSILICATE GLASS; DEPOSITION; LAYERS; LEAD OXIDES; LIFETIME; MICROCHANNEL ELECTRON MULTIPLIERS; STABILITY; SUBSTRATES; THICKNESS