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Title: Memcapacitive characteristics in reactive-metal (Mo, Al)/HfO{sub X}/n-Si structures through migration of oxygen by applied voltage

Memcapacitive characteristics were investigated in metal-oxide-semiconductor (MOS) structure of reactive electrode (Mo, Al) and hafnium oxide (HfO{sub X}) on n-type Si substrate. The capacitance-voltage curves exhibited sequentially changing capacitance with memory function as repeating voltage sweeps, featured the memcapacitive behaviors. The saturation capacitance was decreased by repeating +V sweeps, while barely changed by −V sweeps. Also, the capacitance-time curves disclosed the same tendency. However, the MOS structure with inert Pt electrode did not show the capacitance change. The memcapacitive behaviors were induced by the migration of oxygen ions from HfO{sub X} to reactive electrodes by applied voltage, which altered the permittivity of HfO{sub X}.
Authors:
; ; ; ;  [1] ;  [2] ;  [3]
  1. Department of Materials Science and Engineering, Myongji University, Gyeonggi-do 449-728 (Korea, Republic of)
  2. Department of Physics, Myongji University, Gyeonggi-do 449-728 (Korea, Republic of)
  3. Department of Chemical Engineering, Myongji University, Gyeonggi-do 449-728 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22489407
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 108; Journal Issue: 5; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CAPACITANCE; ELECTRIC POTENTIAL; ELECTRODES; HAFNIUM OXIDES; METALS; OXYGEN; OXYGEN IONS; PERMITTIVITY; SEMICONDUCTOR MATERIALS; SILICON OXIDES; SUBSTRATES