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Title: Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million

We demonstrate high quality-factor 1.5 mm diameter batch-fabricated microcrystalline diamond cylindrical resonators (CR) with quality-factors limited by thermoelastic damping (TED) and surface loss. Resonators were fabricated 2.6 and 5.3 μm thick in-situ boron-doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. The quality-factor (Q) of as-fabricated CR's was found to increase with the resonator diameter and diamond thickness. Annealing the CRs at 700 °C in a nitrogen atmosphere led to a three-fold increase in Q, a result we attribute to thinning of the diamond layer via reaction with residual O{sub 2} in the annealing furnace. Post-anneal Q exceeding 0.5 million (528 000) was measured at the 19 kHz elliptical wineglass modes, producing a ring-down time of 8.9 s. A model for Q versus diamond thickness and resonance frequency is developed including the effects of TED and surface loss. Measured quality factors are shown to agree with the predictions of this model.
Authors:
; ;  [1] ;  [2] ;  [3] ;  [2] ;  [4]
  1. Department of Mechanical Engineering, University of California, Berkeley, California 94720 (United States)
  2. Department of Mechanical and Aerospace Engineering, University of California, Davis, California 95616 (United States)
  3. Department of Electrical and Computer Engineering, University of California, Davis, California 95616 (United States)
  4. (United States)
Publication Date:
OSTI Identifier:
22489401
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 108; Journal Issue: 5; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANNEALING; BORON; CHEMICAL VAPOR DEPOSITION; DIAMONDS; DOPED MATERIALS; KHZ RANGE; NITROGEN; QUALITY FACTOR; RESONATORS; THICKNESS