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Title: Nitride passivation of the interface between high-k dielectrics and SiGe

In-situ direct ammonia (NH{sub 3}) plasma nitridation has been used to passivate the Al{sub 2}O{sub 3}/SiGe interfaces with Si nitride and oxynitride. X-ray photoelectron spectroscopy of the buried Al{sub 2}O{sub 3}/SiGe interface shows that NH{sub 3} plasma pre-treatment should be performed at high temperatures (300 °C) to fully prevent Ge nitride and oxynitride formation at the interface and Ge out-diffusion into the oxide. C-V and I-V spectroscopy results show a lower density of interface traps and smaller gate leakage for samples with plasma nitridation at 300 °C.
Authors:
 [1] ;  [2] ;  [1] ;  [2] ; ;  [3] ; ;  [4] ; ;  [5] ; ; ;  [6] ;  [7] ;  [1]
  1. Department of Chemistry and Biochemistry, University of California, San Diego, La Jolla, California 92093-0358 (United States)
  2. (United States)
  3. Department of Materials Science and Engineering, Stanford University, Stanford, California 94305 (United States)
  4. Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, New York 12222 (United States)
  5. TD Research, GLOBALFOUNDRIES US, Inc., Albany, New York 12203 (United States)
  6. Applied Materials, Inc., Santa Clara, California 95054 (United States)
  7. California Institute for Telecommunications and Information Technology, University of California San Diego, La Jolla, California 92093-0436 (United States)
Publication Date:
OSTI Identifier:
22489232
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 108; Journal Issue: 1; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALUMINIUM OXIDES; AMMONIA; DIELECTRIC MATERIALS; DIFFUSION; GERMANIUM SILICIDES; INTERFACES; LEAKS; NITRIDATION; PASSIVATION; PLASMA; TEMPERATURE RANGE 0400-1000 K; TRAPS; X-RAY PHOTOELECTRON SPECTROSCOPY