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Title: Efficiency of a multilayer-Laue-lens with a 102 μm aperture

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4929505· OSTI ID:22489150
;  [1];  [1];  [1]; ;  [2]
  1. Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
  2. NSLS-II, Brookhaven National Laboratory, Upton, New York 11973 (United States)

A multilayer-Laue-lens (MLL) comprised of WSi{sub 2}/Al layers stacked to a full thickness of 102 μm was characterized for its diffraction efficiency and dynamical diffraction properties by x-ray measurements made in the far field. The achieved aperture roughly doubles the previous maximum reported aperture for an MLL, thereby doubling the working distance. Negative and positive first orders were found to have 14.2% and 13.0% efficiencies, respectively. A section thickness of 9.6 μm was determined from Laue-case thickness fringes in the diffraction data. A background gas consisting of 90% Ar and 10% N{sub 2} was used for sputtering. This material system was chosen to reduce grown-in stress as the multilayer is deposited. Although some regions of the full MLL exhibited defects, the presently reported results were obtained for a region devoid of defects. The data compare well to dynamical diffraction calculations with Coupled Wave Theory (CWT) which provided confirmation of the optical constants and densities assumed for the CWT calculations.

OSTI ID:
22489150
Journal Information:
Applied Physics Letters, Vol. 107, Issue 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

Cited By (4)

Interlaced zone plate optics for hard X-ray imaging in the 10 nm range journal March 2017
Multilayer Laue Lens: A Brief History and Current Status journal July 2016
Point focusing with flat and wedged crossed multilayer Laue lenses journal February 2017
Achieving diffraction-limited nanometer-scale X-ray point focus with two crossed multilayer Laue lenses: alignment challenges journal January 2017