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Title: Temperature dependence of frequency dispersion in III–V metal-oxide-semiconductor C-V and the capture/emission process of border traps

This paper presents a detailed investigation of the temperature dependence of frequency dispersion observed in capacitance-voltage (C-V) measurements of III-V metal-oxide-semiconductor (MOS) devices. The dispersion in the accumulation region of the capacitance data is found to change from 4%–9% (per decade frequency) to ∼0% when the temperature is reduced from 300 K to 4 K in a wide range of MOS capacitors with different gate dielectrics and III-V substrates. We show that such significant temperature dependence of C-V frequency dispersion cannot be due to the temperature dependence of channel electrostatics, i.e., carrier density and surface potential. We also show that the temperature dependence of frequency dispersion, and hence, the capture/emission process of border traps can be modeled by a combination of tunneling and a “temperature-activated” process described by a non-radiative multi-phonon model, instead of a widely believed single-step elastic tunneling process.
Authors:
; ;  [1] ;  [2] ; ; ; ;  [3] ;  [4] ; ;  [5] ; ;  [6] ;  [7]
  1. Department of Electrical Engineering, KU Leuven, B-3000 Leuven (Belgium)
  2. (Belgium)
  3. IMEC, Kapeldreef 75, B-3001 Leuven (Belgium)
  4. Frontier Research Center, Tokyo Institute of Technology, Yokohama 226-8502 (Japan)
  5. ASM International, B-3001 Leuven (Belgium)
  6. ASM International, Phoenix, Arizona 85034-7200 (United States)
  7. Institute of Information and Communication Technologies, Electronics and Applied Mathematics, Universiteé Catholique de Louvain, B-1348 Louvain-la-Neuve (Belgium)
Publication Date:
OSTI Identifier:
22489069
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 5; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CAPACITANCE; CAPACITORS; CARRIER DENSITY; DIELECTRIC MATERIALS; ELECTROSTATICS; METALS; PHONONS; SEMICONDUCTOR MATERIALS; SILICON OXIDES; SUBSTRATES; SURFACE POTENTIAL; TEMPERATURE DEPENDENCE; TRAPS; TUNNEL EFFECT