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Title: Optical response of columnar TiO{sub 2}:Co on Si substrate

Vertically arranged columnar TiO{sub 2}:Co structure has been deposited on Si (100) substrate using the metal organic chemical vapor deposition (MOCVD) technique. SEM images confirm the columnar structure of the TiO{sub 2}:Co layer on Si (100). Concentration of the Co dopant has been defined by means of the energy dispersive x-ray (EDX) spectra. Co concentrations are varied at 0.18, 0.33, and 0.68 at. % using pure TiO{sub 2} as the reference. X-ray diffraction (XRD) spectra show that the TiO{sub 2}:Co layer have a rutile phase. Further analysis of this structure has been performed by using room temperature spectroscopic ellipsometry (SE) measurements in the energy range of 0.5 - 6.5 eV. This optical response shows the unique feature of significantly high density fringe especially below the band gap energy region (lower than 3.3 eV) in contrast to the conventional TiO{sub 2} thin film structure. This unique feature is interpreted as a dominant contribution of the vertical interfaces at columnar boundaries towards reflected light from the sample. The evolution of Ψ and Δ will be discussed as the function of Co concentration and some optical properties will be extracted after reasonably well data fitting by multilayer modelling. Furthermore, by comparing the SEmore » data from different measurement orientations, it has been shown that TiO{sub 2}:Co tends to be anisotropic. This study enables us to further evaluate structural properties through optical responses given by SE measurement.« less
Authors:
 [1] ;  [2] ; ;  [1] ;  [3] ;  [3]
  1. Department of Physics, Institut Teknologi Bandung, Ganesha 10 Bandung 40132 (Indonesia)
  2. Department of Physics, Universitas Pendidikan Indonesia, Setiabudi 229, Bandung, 40154 Indonesia (Indonesia)
  3. (Singapore)
Publication Date:
OSTI Identifier:
22488929
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1677; Journal Issue: 1; Conference: 5. international conference on mathematics and natural sciences, Bandung (Indonesia), 2-3 Nov 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANISOTROPY; CHEMICAL VAPOR DEPOSITION; COMPARATIVE EVALUATIONS; CONCENTRATION RATIO; ELLIPSOMETRY; INTERFACES; LAYERS; OPTICAL PROPERTIES; ORGANOMETALLIC COMPOUNDS; RUTILE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; TITANIUM OXIDES; VISIBLE RADIATION; X-RAY DIFFRACTION