Optical response of columnar TiO{sub 2}:Co on Si substrate
- Department of Physics, Institut Teknologi Bandung, Ganesha 10 Bandung 40132 (Indonesia)
- Department of Physics, Universitas Pendidikan Indonesia, Setiabudi 229, Bandung, 40154 Indonesia (Indonesia)
Vertically arranged columnar TiO{sub 2}:Co structure has been deposited on Si (100) substrate using the metal organic chemical vapor deposition (MOCVD) technique. SEM images confirm the columnar structure of the TiO{sub 2}:Co layer on Si (100). Concentration of the Co dopant has been defined by means of the energy dispersive x-ray (EDX) spectra. Co concentrations are varied at 0.18, 0.33, and 0.68 at. % using pure TiO{sub 2} as the reference. X-ray diffraction (XRD) spectra show that the TiO{sub 2}:Co layer have a rutile phase. Further analysis of this structure has been performed by using room temperature spectroscopic ellipsometry (SE) measurements in the energy range of 0.5 - 6.5 eV. This optical response shows the unique feature of significantly high density fringe especially below the band gap energy region (lower than 3.3 eV) in contrast to the conventional TiO{sub 2} thin film structure. This unique feature is interpreted as a dominant contribution of the vertical interfaces at columnar boundaries towards reflected light from the sample. The evolution of Ψ and Δ will be discussed as the function of Co concentration and some optical properties will be extracted after reasonably well data fitting by multilayer modelling. Furthermore, by comparing the SE data from different measurement orientations, it has been shown that TiO{sub 2}:Co tends to be anisotropic. This study enables us to further evaluate structural properties through optical responses given by SE measurement.
- OSTI ID:
- 22488929
- Journal Information:
- AIP Conference Proceedings, Vol. 1677, Issue 1; Conference: 5. international conference on mathematics and natural sciences, Bandung (Indonesia), 2-3 Nov 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANISOTROPY
CHEMICAL VAPOR DEPOSITION
COMPARATIVE EVALUATIONS
CONCENTRATION RATIO
ELLIPSOMETRY
INTERFACES
LAYERS
OPTICAL PROPERTIES
ORGANOMETALLIC COMPOUNDS
RUTILE
SCANNING ELECTRON MICROSCOPY
SUBSTRATES
TEMPERATURE RANGE 0273-0400 K
THIN FILMS
TITANIUM OXIDES
VISIBLE RADIATION
X-RAY DIFFRACTION