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Title: Influence of substrate temperature and post annealing of CuGaO{sub 2} thin films on optical and structural properties

A transparent p-type thin film CuGaO{sub 2} was deposited by using RF sputtering deposition method on plastic (PET) and glass substrate. The characteristics of the film is investigated. The thin film was deposited at temperature range from 50-250°C and the pressure inside the chamber is 1.0×10{sup −2} Torr and Argon gas was used as a working gas. The RF power is set to 100 W. The thickness of thin film is 300nm. In this experiment the transparency of the thin film is more than 70% for the visible light region. The band gap obtain is between 3.3 to 3.5 eV. The details of the results will be discussed in the conference.
Authors:
; ; ;  [1] ; ;  [2]
  1. Faculty of Science and Natural Resources, Universiti Malaysia Sabah, 88999, Kota Kinabalu, Sabah (Malaysia)
  2. Faculty of Engineering, Universiti Malaysia Sabah, 88999 Kota Kinabalu, Sabah (Malaysia)
Publication Date:
OSTI Identifier:
22488766
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1674; Journal Issue: 1; Conference: ICASIT2015: International conference on applied sciences and industrial technology, Negeri Sembilan (Malaysia), 24-26 Feb 2015; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; ARGON; DEPOSITION; EV RANGE; GLASS; OPACITY; PLASTICS; POSITRON COMPUTED TOMOGRAPHY; PRESSURE DEPENDENCE; P-TYPE CONDUCTORS; SPUTTERING; SUBSTRATES; TEMPERATURE DEPENDENCE; THIN FILMS; VISIBLE RADIATION