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Title: MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model

Pre-fabrication, behavioural and performance analysis with computer aided design (CAD) tools is a common and fabrication cost effective practice. In light of this we present a simulation methodology for a dual-mass oscillator based 3 Degree of Freedom (3-DoF) MEMS gyroscope. 3-DoF Gyroscope is modeled through lumped parameter models using equivalent circuit elements. These equivalent circuits consist of elementary components which are counterpart of their respective mechanical components, used to design and fabricate 3-DoF MEMS gyroscope. Complete designing of equivalent circuit model, mathematical modeling and simulation are being presented in this paper. Behaviors of the equivalent lumped models derived for the proposed device design are simulated in MEMSPRO T-SPICE software. Simulations are carried out with the design specifications following design rules of the MetalMUMPS fabrication process. Drive mass resonant frequencies simulated by this technique are 1.59 kHz and 2.05 kHz respectively, which are close to the resonant frequencies found by the analytical formulation of the gyroscope. The lumped equivalent circuit modeling technique proved to be a time efficient modeling technique for the analysis of complex MEMS devices like 3-DoF gyroscopes. The technique proves to be an alternative approach to the complex and time consuming couple field analysis Finite Element Analysis (FEA)more » previously used.« less
Authors:
; ;  [1] ;  [2] ; ;  [3] ;  [4]
  1. Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Tronoh, Perak (Malaysia)
  2. Department of Fundamental & Applied Sciences, Universiti Teknologi PETRONAS, Tronoh, Perak (Malaysia)
  3. Faculty of Electronics Engineering, GIK Institute of Engineering Sciences and Technology, Topi, Khyber Pakhtunkhaw (Pakistan)
  4. Department of Computer Science, Center for Advance Studies in Engineering, Islamabad (Pakistan)
Publication Date:
OSTI Identifier:
22488609
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1669; Journal Issue: 1; Conference: SCMSM 2014: 23. scientific conference of Microscopy Society Malaysia, Tronoh (Malaysia), 10-12 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COMPUTER CODES; COMPUTER-AIDED DESIGN; DEGREES OF FREEDOM; EQUIVALENT CIRCUITS; FABRICATION; FINITE ELEMENT METHOD; GYROSCOPES; KHZ RANGE; MATHEMATICAL MODELS; MEMS; OSCILLATORS; SIMULATION; VISIBLE RADIATION