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Title: Vibration piezoelectric energy harvester with multi-beam

This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3}) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3}) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm{sup 2}, the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d{sub 33} is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency. .
Authors:
; ;  [1] ;  [2] ;  [3]
  1. Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, 116024, Dalian, Liaoning Province (China)
  2. School of Electronic and Information Engineering, Dalian University of Technology, 116024, Dalian, Liaoning Province (China)
  3. State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, 100081, Beijing Province (China)
Publication Date:
OSTI Identifier:
22488523
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Advances; Journal Volume: 5; Journal Issue: 4; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; BEAMS; ELECTRIC POTENTIAL; LEAKAGE CURRENT; MEASURING METHODS; PIEZOELECTRICITY; POLARIZATION; PZT; THIN FILMS; X-RAY DIFFRACTION