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Title: Optimization of the imaging response of scanning microwave microscopy measurements

In this work, we present the analytical modeling and preliminary experimental results for the choice of the optimal frequencies when performing amplitude and phase measurements with a scanning microwave microscope. In particular, the analysis is related to the reflection mode operation of the instrument, i.e., the acquisition of the complex reflection coefficient data, usually referred as S{sub 11}. The studied configuration is composed of an atomic force microscope with a microwave matched nanometric cantilever probe tip, connected by a λ/2 coaxial cable resonator to a vector network analyzer. The set-up is provided by Keysight Technologies. As a peculiar result, the optimal frequencies, where the maximum sensitivity is achieved, are different for the amplitude and for the phase signals. The analysis is focused on measurements of dielectric samples, like semiconductor devices, textile pieces, and biological specimens.
Authors:
; ; ;  [1] ; ;  [2] ;  [3]
  1. National Research Council, Institute for Microelectronics and Microsystems, Via del Fosso del Cavaliere 100, 00133 Rome (Italy)
  2. Biophysics Institute, Johannes Kepler University, Gruberstrasse 40, 4020 Linz (Austria)
  3. Keysight Technologies Austria GmbH, Gruberstrasse 40, 4020 Linz (Austria)
Publication Date:
OSTI Identifier:
22486356
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AMPLITUDES; ATOMIC FORCE MICROSCOPY; COAXIAL CABLES; DIELECTRIC MATERIALS; MICROSCOPES; MICROWAVE RADIATION; NANOSTRUCTURES; OPTIMIZATION; REFLECTION; RESONATORS; SEMICONDUCTOR DEVICES; SENSITIVITY; SIGNALS; VECTORS