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Title: Optimization of the imaging response of scanning microwave microscopy measurements

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4927385· OSTI ID:22486356
; ; ; ;  [1];  [2]
  1. Biophysics Institute, Johannes Kepler University, Gruberstrasse 40, 4020 Linz (Austria)
  2. Keysight Technologies Austria GmbH, Gruberstrasse 40, 4020 Linz (Austria)

In this work, we present the analytical modeling and preliminary experimental results for the choice of the optimal frequencies when performing amplitude and phase measurements with a scanning microwave microscope. In particular, the analysis is related to the reflection mode operation of the instrument, i.e., the acquisition of the complex reflection coefficient data, usually referred as S{sub 11}. The studied configuration is composed of an atomic force microscope with a microwave matched nanometric cantilever probe tip, connected by a λ/2 coaxial cable resonator to a vector network analyzer. The set-up is provided by Keysight Technologies. As a peculiar result, the optimal frequencies, where the maximum sensitivity is achieved, are different for the amplitude and for the phase signals. The analysis is focused on measurements of dielectric samples, like semiconductor devices, textile pieces, and biological specimens.

OSTI ID:
22486356
Journal Information:
Applied Physics Letters, Vol. 107, Issue 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English