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Title: Effects of magnetic field and pressure in magnetoelastic stress reconfigurable thin film resonators

Free-standing CoFe thin-film doubly clamped stress reconfigurable resonators were investigated as a function of magnetic field and pressure. A large uniaxial anisotropy resulting from residual uniaxial tensile stress, as revealed from magnetic hysteresis loops, leads to an easy magnetization axis aligned along the length of the beams. The quality factor of the driven resonator beams under vacuum is increased by 30 times, leading to an enhanced signal-to-noise ratio and a predicted reduction in the intrinsic magnetic noise by a factor of 6, potentially reaching as low as ∼25 pT/√Hz at 1 Torr. Stress reconfigurable sensors operating under vacuum could thus further improve the limit of detection and advance development of magnetic field sensing technology.
Authors:
; ;  [1] ; ;  [2] ; ;  [3] ;  [4] ;  [5] ;  [5] ;  [6]
  1. Naval Research Laboratory, Washington, DC 20375 (United States)
  2. Department of Physics and Astronomy, Rowan University, Glassboro, New Jersey 08028 (United States)
  3. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742 (United States)
  4. Normandie Univ. (France)
  5. (France)
  6. Naval Undersea Warfare Center, Newport, Rhode Island 02841 (United States)
Publication Date:
OSTI Identifier:
22486351
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANISOTROPY; BEAMS; DETECTION; HYSTERESIS; LENGTH; MAGNETIC FIELDS; MAGNETIZATION; QUALITY FACTOR; RESONATORS; SENSORS; SIGNAL-TO-NOISE RATIO; STRESSES; THIN FILMS