Integration of quantum cascade lasers and passive waveguides

Journal Article · Mon Jul 20 00:00:00 EDT 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4927430· OSTI ID:22486325

Montoya, Juan; Wang, Christine; Goyal, Anish; Creedon, Kevin; Connors, Michael; Daulton, Jeffrey; Donnelly, Joseph; Missaggia, Leo; Aleshire, Chris; Sanchez-Rubio, Antonio; Herzog, William ^[1]

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1. MIT Lincoln Laboratory, 244 Wood St, Lexington, Massachusetts 02420 (United States)

We report on monolithic integration of active quantum cascade laser (QCL) materials with passive waveguides formed by using proton implantation. Proton implantation reduces the electron concentration in the QCL layers by creating deep levels that trap carriers. This strongly reduces the intersubband absorption and the free-carrier absorption in the gain region and surrounding layers, thus significantly reducing optical loss. We have measured loss as low as α = 0.33 cm{sup −1} in λ = 9.6 μm wavelength proton-implanted QCL material. We have also demonstrated lasing in active-passive integrated waveguides. This simple integration technique is anticipated to enable low-cost fabrication in infrared photonic integrated circuits in the mid-infrared (λ ∼ 3–16 μm)

• OSTI ID: 22486325
• Journal Information: Applied Physics Letters, Vol. 107, Issue 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABSORPTION
CARRIERS
FABRICATION
GAIN
INTEGRATED CIRCUITS
LASERS
LAYERS
PROTONS
WAVEGUIDES
WAVELENGTHS