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Title: Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.
Authors:
; ; ; ;  [1]
  1. Department of Electrical and Computer Engineering, University of Illinois, Urbana, Illinois 61801 (United States)
Publication Date:
OSTI Identifier:
22486320
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; FABRICATION; SILICON; TRANSMISSION; WAVEGUIDES