Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Yu, Xin; Arbabi, Ehsan; Goddard, Lynford L.; Li, Xiuling; Chen, Xiaogang

doi:10.1063/1.4927243

Title: Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Journal Article · Mon Jul 20 00:00:00 EDT 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4927243· OSTI ID:22486320

Yu, Xin; Arbabi, Ehsan; Goddard, Lynford L.; Li, Xiuling; Chen, Xiaogang ^[1]

Department of Electrical and Computer Engineering, University of Illinois, Urbana, Illinois 61801 (United States)

We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

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OSTI ID:: 22486320

Journal Information:: Applied Physics Letters, Vol. 107, Issue 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951

Country of Publication:: United States

Language:: English

References (13)

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Printing, folding and assembly methods for forming 3D mesostructures in advanced materials Zhang, Yihui; Zhang, Fan; Yan, Zheng Nature Reviews Materials, Vol. 2, Issue 4 https://doi.org/10.1038/natrevmats.2017.19	journal	March 2017
Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides Yu, Xin; Goddard, Lynford L.; Zhu, Jinlong Applied Physics Letters, Vol. 112, Issue 2 https://doi.org/10.1063/1.5017707	journal	January 2018
Hybrid nanomembrane-based capacitors for the determination of the dielectric constant of semiconducting molecular ensembles Petrini, Paula A.; Silva, Ricardo M. L.; de Oliveira, Rafael F. Nanotechnology, Vol. 29, Issue 26 https://doi.org/10.1088/1361-6528/aabc44	journal	May 2018
Infrared tubular microcavity based on rolled-up GeSn/Ge nanomembranes Wu, Xiang; Tian, Ziao; Cong, Hui Nanotechnology, Vol. 29, Issue 42 https://doi.org/10.1088/1361-6528/aad66e	journal	August 2018
Multiplexing and tuning of a double set of resonant modes in optical microtube cavities monolithically integrated on a photonic chip Madani, Abbas; Naz, Ehsan Saei Ghareh; Harazim, Stefan Optics Letters, Vol. 43, Issue 19 https://doi.org/10.1364/ol.43.004703	journal	September 2018
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