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Title: Broadband enhancement of infrared absorption in microbolometers using Ag nanocrystals

High performance microbolometers are widely sought for thermal imaging applications. In order to increase the performance limits of microbolometers, the responsivity of the device to broadband infrared (IR) radiation needs to be improved. In this work, we report a simple, quick, and cost-effective approach to modestly enhance the broadband IR response of the device by evaporating Ag nanocrystals onto the light entrance surface of the device. When irradiated with IR light, strong fields are built up within the gaps between adjacent Ag nanocrystals. These fields resistively generate heat in the nanocrystals and underlying substrate, which is transduced into an electrical signal via a resistive sensing element in the device. Through this method, we are able to enhance the IR absorption over a broadband spectrum and improve the responsivity of the device by ∼11%.
Authors:
 [1] ; ; ; ; ; ;  [2] ;  [3]
  1. Department of Chemistry and Nano Science, Ewha Womans University, Seoul 120-750 (Korea, Republic of)
  2. National Nano-Fab Center, Daejeon 305-701 (Korea, Republic of)
  3. S-Package Solution Co., Ltd., Daegu 702-701 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22486280
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 25; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABSORPTION; BOLOMETERS; EQUIPMENT; HEAT; INFRARED RADIATION; IRRADIATION; NANOSTRUCTURES; PERFORMANCE; SIGNALS; SPECTRA; SUBSTRATES; SURFACES