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Title: High quality factor indium oxide mechanical microresonators

The mechanical resonance behavior of as-grown In{sub 2}O{sub 3} microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than 10{sup 5} and minimum detectable forces of the order of 10{sup −16} N/Hz{sup 1/2} demonstrate their potential as mechanical microresonators for real applications. Measurements at low-vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.
Authors:
; ;  [1]
  1. Department of Materials Physics, Faculty of Physics, Universidad Complutense de Madrid, 28040 Madrid (Spain)
Publication Date:
OSTI Identifier:
22486045
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 107; Journal Issue: 19; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALUMINIUM OXIDES; CERAMICS; DAMPING; ENERGY LOSSES; INDIUM OXIDES; MECHANICAL VIBRATIONS; PRESSURE DEPENDENCE; QUALITY FACTOR; RESONATORS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; VAPORS