skip to main content

SciTech ConnectSciTech Connect

Title: Thermo-acoustic engineering of silicon microresonators via evanescent waves

A temperature-compensated silicon micromechanical resonator with a quadratic temperature characteristic is realized by acoustic engineering. Energy-trapped resonance modes are synthesized by acoustic coupling of propagating and evanescent extensional waves in waveguides with rectangular cross section. Highly different temperature sensitivity of propagating and evanescent waves is used to engineer the linear temperature coefficient of frequency. The resulted quadratic temperature characteristic has a well-defined turn-over temperature that can be tailored by relative energy distribution between propagating and evanescent acoustic fields. A 76 MHz prototype is implemented in single crystal silicon. Two high quality factor and closely spaced resonance modes, created from efficient energy trapping of extensional waves, are excited through thin aluminum nitride film. Having different evanescent wave constituents and energy distribution across the device, these modes show different turn over points of 67 °C and 87 °C for their quadratic temperature characteristic.
Authors:
 [1] ;  [2]
  1. Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109 (United States)
  2. School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30308 (United States)
Publication Date:
OSTI Identifier:
22483131
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 26; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALUMINIUM; ENERGY SPECTRA; FILMS; MHZ RANGE; MONOCRYSTALS; QUALITY FACTOR; RESONATORS; SENSITIVITY; SILICON; TEMPERATURE COEFFICIENT; TRAPPING; WAVEGUIDES