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Title: Development of a long-slot microwave plasma source

A 20 cm long 10 cm wide microwave plasma source was realized by inserting two 20 cm long 1.5 mm diameter rod antennas into the plasma. Plasma luminous distributions around the antennas were changed by magnetic field arrangement created by permanent magnets attached to the source. The distributions appeared homogeneous in one direction along the antenna when the spacing between the antenna and the source wall was 7.5 mm for the input microwave frequency of 2.45 GHz. Plasma density and temperature at a plane 20 cm downstream from the microwave shield were measured by a Langmuir probe array at 150 W microwave power input. The measured electron density and temperature varied over space from 3.0 × 10{sup 9} cm{sup −3} to 5.8 × 10{sup 9} cm{sup −3}, and from 1.1 eV to 2.1 eV, respectively.
Authors:
; ; ;  [1]
  1. Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)
Publication Date:
OSTI Identifier:
22483048
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ANTENNAS; DISTRIBUTION; ELECTRON DENSITY; EV RANGE 01-10; GHZ RANGE 01-100; LANGMUIR PROBE; MAGNETIC FIELDS; MICROWAVE RADIATION; PERMANENT MAGNETS; PLASMA DENSITY