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Title: Development of Wien filter for small ion gun of surface analysis

The gas cluster ion beam (GCIB) and liquid metal ion beam have been studied in the context of ion beam usage for analytical equipment in applications such as X-ray photoelectron spectroscopy and secondary ion mass spectroscopy (SIMS). In particular, small ion sources are used for the secondary ion generation and ion etching. To set the context to this study, the SIMS project has been launched to develop ion-gun based analytical equipment for the Korea Basic Science Institute. The objective of the first stage of the project is the generation of argon beams with a GCIB system [A. Kirkpatrick, Nucl. Instrum. Methods Phys. Res., Sect. B 206, 830–837 (2003)] that consists of a nozzle, skimmer, ionizer, acceleration tube, separation system, transport system, and target. The Wien filter directs the selected cluster beam to the target system by exploiting the velocity difference of the generated particles from GCIB. In this paper, we present the theoretical modeling and three-dimensional electromagnetic analysis of the Wien filter, which can separate Ar{sup +}{sub 2500} clusters from Ar{sup +}{sub 2400} to Ar{sup +}{sub 2600} clusters with a 1-mm collimator.
Authors:
 [1] ;  [2] ; ; ; ;  [3]
  1. Department of Physics, Kyungpook National University, Daegu 702-701 (Korea, Republic of)
  2. (Korea, Republic of)
  3. Busan Center, Korea Basic Science Institute, Busan 609-735 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22483004
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCELERATION; ARGON IONS; CLUSTER BEAMS; FILTERS; ION BEAMS; ION MICROPROBE ANALYSIS; ION SOURCES; LIQUID METALS; MASS SPECTROSCOPY; SKIMMERS; THREE-DIMENSIONAL LATTICES; X-RAY PHOTOELECTRON SPECTROSCOPY