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Title: Brightness measurement of an electron impact gas ion source for proton beam writing applications

We are developing a high brightness nano-aperture electron impact gas ion source, which can create ion beams from a miniature ionization chamber with relatively small virtual source sizes, typically around 100 nm. A prototype source of this kind was designed and successively micro-fabricated using integrated circuit technology. Experiments to measure source brightness were performed inside a field emission scanning electron microscope. The total output current was measured to be between 200 and 300 pA. The highest estimated reduced brightness was found to be comparable to the injecting focused electron beam reduced brightness. This translates into an ion reduced brightness that is significantly better than that of conventional radio frequency ion sources, currently used in single-ended MeV accelerators.
Authors:
;  [1] ;  [2] ; ; ;  [1] ;  [3]
  1. Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542 (Singapore)
  2. (Singapore)
  3. Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583 (Singapore)
Publication Date:
OSTI Identifier:
22482905
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCELERATORS; APERTURES; BRIGHTNESS; DESIGN; ELECTRON BEAMS; FIELD EMISSION; INTEGRATED CIRCUITS; ION SOURCES; MEV RANGE; PROTON BEAMS; RADIOWAVE RADIATION; SCANNING ELECTRON MICROSCOPY