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Title: A laboratory 8 keV transmission full-field x-ray microscope with a polycapillary as condenser for bright and dark field imaging

This article introduces a laboratory setup of a transmission full-field x-ray microscope at 8 keV photon energy. The microscope operates in bright and dark field imaging mode with a maximum field of view of 50 μm. Since the illumination geometry determines whether the sample is illuminated homogeneously and moreover, if different imaging methods can be applied, the condenser optic is one of the most significant parts. With a new type of x-ray condenser, a polycapillary optic, we realized bright field imaging and for the first time dark field imaging at 8 keV photon energy in a laboratory setup. A detector limited spatial resolution of 210 nm is measured on x-ray images of Siemens star test patterns.
Authors:
;  [1] ; ;  [2] ;  [3]
  1. Institute for X-Optics, University of Applied Sciences Koblenz, RheinAhrCampus Remagen, Joseph-Rovan-Allee 2, D-53424 Remagen (Germany)
  2. Institute for Optics and Atomic Physics, Technical University of Berlin, Hardenbergstrasse 36, D-10623 Berlin (Germany)
  3. Max-Born-Institute, Max-Born-Strasse 2A, D-12489 Berlin (Germany)
Publication Date:
OSTI Identifier:
22482746
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; COMPRESSORS; HEAT EXCHANGERS; IMAGES; KEV RANGE 01-10; MICROSCOPES; PHOTONS; SPATIAL RESOLUTION; TRANSMISSION; VAPOR CONDENSERS; X RADIATION