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Title: Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons.
Authors:
;  [1] ;  [1] ;  [2] ;  [1] ;  [2]
  1. Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk 634050 (Russian Federation)
  2. (Russian Federation)
Publication Date:
OSTI Identifier:
22482637
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 12; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ARGON; ELECTRODES; ELECTRON BEAMS; HYDROCARBONS; MASS; NITROGEN; OPERATION; OPTIMIZATION; OXYGEN; PLASMA; PRESSURE RANGE