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Title: Characterizing the complex permittivity of high-κ dielectrics using enhanced field method

This paper proposed a method to characterize the complex permittivities of samples based on the enhancement of the electric field strength. The enhanced field method significantly improves the measuring range and accuracy of the samples’ electrical properties. Full-wave simulations reveal that the resonant frequency is closely related to the dielectric constant of the sample. In addition, the loss tangent can be determined from the measured quality factor and the just obtained dielectric constant. Materials with low dielectric constant and very low loss tangent are measured for benchmarking and the measured results agree well with previous understanding. Interestingly, materials with extremely high dielectric constants (ε{sub r} > 50), such as titanium dioxide, calcium titanate, and strontium titanate, differ greatly as expected.
Authors:
; ;  [1]
  1. Department of Physics, National Tsing Hua University, Hsinchu 30024, Taiwan (China)
Publication Date:
OSTI Identifier:
22482609
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 11; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; BENCHMARKS; ELECTRIC FIELDS; LOSSES; PERMITTIVITY; QUALITY FACTOR; SIMULATION; TITANATES; TITANIUM OXIDES