skip to main content

SciTech ConnectSciTech Connect

Title: A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. Here, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. As first examples, we present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er{sub 2}O{sub 3} ALD on amorphous ALD alumina and single crystalline sapphire.
Authors:
; ; ;  [1] ;  [1] ;  [2] ; ;  [3] ; ;  [4] ;  [5] ;  [2]
  1. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
  2. (United States)
  3. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
  4. X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
  5. Department of Chemistry, Illinois Institute of Technology, Chicago, Illinois 60616 (United States)
Publication Date:
OSTI Identifier:
22482605
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 11; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ADVANCED PHOTON SOURCE; ALUMINIUM OXIDES; DESIGN; EPITAXY; ERBIUM OXIDES; MANGANESE OXIDES; MONOCRYSTALS; NUCLEATION; SAPPHIRE; SMALL ANGLE SCATTERING; SYNCHROTRONS; X RADIATION; X-RAY SPECTROSCOPY; ZINC OXIDES